Nearly 200 countries signed the Paris Agreement at the end of 2015 in order to cope with the crisis caused by global warming. 95% of the possibility is that CO2 emitted from human activities causes global warming. Therefore, encouraging enterprises to carry out low-carbon technology innovation, which can help enterprises reduce CO2 emissions in the production process, is one of the most effective ways to control the greenhouse effect from the source. Due to the limitations of the industry’s own research and development (R&D) capabilities, the cooperation innovation of low-carbon technology in industryuniversity- research-government (IURG) is the most feasible solution. This paper uses the combination of the Decision-Making Trial and Evaluation Laboratory (DEMATEL) and interpretative structural modelling method (ISM) to explore the influencing factors of collaborative innovation in low-carbon technology. The results of the model show the relationship between the 13 factors of economic interest, management and macro environment affecting the collaborative innovation of low-carbon technologies in IURG. The social low-carbon awareness and culture and industry low-carbon value awareness have been innovatively proposed, which has had a neglected impact on the research issues. The research in this paper can effectively improve the diffusion efficiency of low-carbon technology in China, with a view to helping achieve the Paris Agreement goals.